JPH0418445U - - Google Patents
Info
- Publication number
- JPH0418445U JPH0418445U JP5801990U JP5801990U JPH0418445U JP H0418445 U JPH0418445 U JP H0418445U JP 5801990 U JP5801990 U JP 5801990U JP 5801990 U JP5801990 U JP 5801990U JP H0418445 U JPH0418445 U JP H0418445U
- Authority
- JP
- Japan
- Prior art keywords
- self
- carrier
- propelled
- propelled cart
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5801990U JPH0418445U (en]) | 1990-06-01 | 1990-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5801990U JPH0418445U (en]) | 1990-06-01 | 1990-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418445U true JPH0418445U (en]) | 1992-02-17 |
Family
ID=31583251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5801990U Pending JPH0418445U (en]) | 1990-06-01 | 1990-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418445U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010219337A (ja) * | 2009-03-17 | 2010-09-30 | Honda Motor Co Ltd | 板状部材の位置決め搬送方法及びその装置 |
-
1990
- 1990-06-01 JP JP5801990U patent/JPH0418445U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010219337A (ja) * | 2009-03-17 | 2010-09-30 | Honda Motor Co Ltd | 板状部材の位置決め搬送方法及びその装置 |